Method of calculating the equivalent mechanical properties of membranes of complex topology for the microsystems technology elements
Abstract
Method of calculating the equivalent mechanical properties of membranes of complex topology for the microsystems technology elements
Incoming article date: 22.05.2013"This article is devoted to the development of the method for modeling elements of microsystems technology(MST) of membrane type. In this paper perforated membranes are considered and the impact of perforation on the mechanical properties of the membranes is examined. In numerical simulations of the elements it is proposed to use the equivalent mechanical parameters of perforated membranes obtained at the initial stage of the simulation. This will allow to obtain find the optimal parameters of perforation, reduce the time and resource modeling of MST elements. To test the technique numerical experiments were conducted for the two square membranes with sides 1.5 and 3 mm fixed on the contour of the same thickness. We studied the influence of the size of the perforation on the equivalent Young's modulus of the perforated membrane. "
Keywords: microsystems technology, numerical modeling, perforated membrane