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Methodology of mems error modeling

Abstract

Methodology of mems error modeling

A.V. Arkhipov, A.S. Timoshenkov

Incoming article date: 23.10.2018

The aim of the article is to analyze the existing methods for constructing a model of random errors in micromechanical sensors. A comparison of different methods for determining the parameters of a random process model is presented: autocorrelation, power spectral density analysis, time domain analysis, and Allan variation analysis. This direction is also supplemented by considering the effect of sensor errors on the error of inertial navigation systems. In conclusion, the synthesis of forming filters for various random errors in micromechanical sensors and the results of simulation are given.

Keywords: mems gyroscope; noise analysis; stochastic drift; error modelling