A design of the actuator, consisting of a thin layers of silicon dioxide and aluminum is proposed. There are calculations made of the response speed and heat dissipation of the actuator. By making the best selection of layer thicknesses and optimization stages of technological process, in particular the deep selective etching of silicon, the best performance on the angle of inclination of the actuator and the speed of the device could be achived. The greater the difference between the initial temperature and the heating temperature, the stronger the beam of the actuator is lowered to the plane of the silicon plate, and, therefore, less angle of elevation above the surface of the silicon plate. It is thus possible to control the angle of the beam by selecting the appropriate heater and voltage, providing the desired temperature. The design of the micromirror device based on the proposed actuator is provided. The developed design is based on the actuator and allows for controling the tilt of the mirror in a wide range.
Keywords: silicon, termoactuator, micromechanical systems, bimorph structure, micromirrors